Sputtering at Acute Incidence
- 1 November 1965
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 36 (11) , 3542-3544
- https://doi.org/10.1063/1.1703035
Abstract
Experimental sputtering yields obtained for incidence angles from 2° to 90° (normal) with incident ion energies of 1.5 to 30 keV are reported. These data were obtained by bombardment of copper, molybdenum, and tungsten surfaces with xenon and argon ions. Brief surveys of low- and high-temperature surface effects are also reported.This publication has 1 reference indexed in Scilit:
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961