Application of the glow discharge mass spectrometry (GDMS) for the multi-element trace and ultratrace analysis of sputtering targets
- 1 January 1994
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 350 (4-5) , 303-309
- https://doi.org/10.1007/bf00322487
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Ultra trace analysis of high-purity aluminiumAnalytical and Bioanalytical Chemistry, 1992
- Ultratrace analysis ? Facts and fictionAnalytical and Bioanalytical Chemistry, 1992
- Application of glow discharge mass spectrometry with low mass resolution for in-depth analysis of technical surface layersJournal of Analytical Atomic Spectrometry, 1992
- Glow discharge: considerations as a versatile analytical source. Plenary lectureJournal of Analytical Atomic Spectrometry, 1992
- Solid state mass spectrometry for materials sciencePublished by Walter de Gruyter GmbH ,1992
- Elemental analysis of high-purity solids by mass spectrometryTalanta, 1990
- Use of glow discharge mass spectrometry for quality control of high-purity aluminiumJournal of Analytical Atomic Spectrometry, 1989
- Glow discharge mass spectrometry — The newest tool for high purity materials analysisJournal of Crystal Growth, 1988
- Quantitative depth profiling by glow discharge mass spectrometrySurface and Interface Analysis, 1988
- Glow discharge mass spectrometry-a powerful technique for the elemental analysis of solidsMicrochimica Acta, 1987