Deposition of cubic boron nitride film by laser PVD with simultaneous N ion supply.

• 1 January 1990
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 56  (10) , 1894-1899
• https://doi.org/10.2493/jjspe.56.1894

Abstract

Keywords

• ION SUPPLY
• BORON NITRIDE
• CUBIC BORON
• LASER PVD
• FILM