Preparation of YBa₂Cu₃O_x Thin Films by Layer-by-Layer Metalorganic Chemical Vapor Deposition

1 June 1992

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 31 (6B) , L787-789
https://doi.org/10.1143/jjap.31.l787

Abstract

We have investigated the preparation of YBa₂Cu₃O_x thin films on MgO (100) substrates by sequential metalorganic source supply with the metal configuration along the c-axis at low substrate temperature (560°C). Oxygen is also sequentially supplied to the substrate. Four types of films are prepared by various sequential supply patterns of metalorganic precursors and oxygen. Our results show that layer-by-layer oxidation is important for c-axis orientation of the films and that Ba is more suitable than Cu as the first layer with respect to preventing the growth of CuYO₂.

Keywords

This publication has 4 references indexed in Scilit:

RHEED study of crystal growth of high temperature superconducting oxides in reactive coevaporation
Physica C: Superconductivity and its Applications, 1991
Microstructure of ultrathin films of ${YBa}_{2}$ ${Cu}_{3}$ $O_{7 - δ}$ on MgO
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Preparation of YBa2Cu3Ox Thin Films by Layer-by-Layer Metalorganic Chemical Vapor Deposition

Abstract

Keywords

Preparation of YBa₂Cu₃O_x Thin Films by Layer-by-Layer Metalorganic Chemical Vapor Deposition