A wafer-to-wafer alignment technique
- 1 December 1989
- journal article
- other
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (3) , 315-316
- https://doi.org/10.1016/0250-6874(89)80131-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Inexpensive and Accurate Two-sided Semiconductor Wafer AlignmentSensors and Actuators, 1988