An interchange format for process and device simulation
- 1 July 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 7 (7) , 741-754
- https://doi.org/10.1109/43.3945
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- MINIMOS - A Two-Dimensional MOS Transistor AnalyzerIEEE Journal of Solid-State Circuits, 1980
- A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etchingIEEE Transactions on Electron Devices, 1980