Low voltage, scalable nanocrystal flash memory fabricated by templated self assembly
- 22 March 2004
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 22.2.1-22.2.4
- https://doi.org/10.1109/iedm.2003.1269340
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Process integration of self-assembled polymer templates into silicon nanofabricationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Optimization of Diblock Copolymer Thin Film Self AssemblyAdvanced Materials, 2002