Fabrication of LiNbO3 Phase Gratings by Excimer Laser Ablation through a Silica Phase Mask
- 1 December 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (12A) , L1593
- https://doi.org/10.1143/jjap.35.l1593
Abstract
Lithium niobate ( LiNbO3) wafer phase gratings were fabricated by excimer pulsed ablation through a transmission silica phase mask grating. Surface morphology of the LiNbO3 phase gratings was studied using an atomic force microscope as well as an optical microscope. Crystal structures and the diffraction patterns of the gratings were characterized by X-ray diffraction and using a He–Ne laser beam, respectively.Keywords
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