Preparation and Some Characteristics of Self-Supporting 300–2500 Å Oxide Films

• 1 July 1969
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 6  (4) , 635-637
• https://doi.org/10.1116/1.1315713

Abstract

Keywords

• ELECTRON BEAM
• THIN FILM
• TITANIUM OXIDE