Study of electrical measurement techniques for ultra-shallow dopant profiling

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 397-403
• https://doi.org/10.1116/1.588482

Abstract

Keywords

• MEASUREMENT TECHNIQUES
• DOPANT PROFILING
• ULTRA SHALLOW
• SHALLOW DOPANT
• ELECTRICAL MEASUREMENT
• STUDY OF ELECTRICAL