Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors
- 28 February 1997
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 44 (1-3) , 46-51
- https://doi.org/10.1016/s0921-5107(96)01797-7
Abstract
No abstract availableKeywords
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