Use of influence diagrams and neural networks in modeling semiconductor manufacturing processes

This publication has 8 references indexed in Scilit:

• Statistical equipment modeling for VLSI manufacturing: an application for LPCVD
  IEEE Transactions on Semiconductor Manufacturing, 1990
• Learning and optimization of machining operations using computing abilities of neural networks
  IEEE Transactions on Systems, Man, and Cybernetics, 1989
• Multiple sensor expert system for diagnostic reasoning, monitoring and control of mechanical systems
  Mechanical Systems and Signal Processing, 1988
• Dynamics of Alopex Process: Application to Optimization Problems
  Published by Springer Nature ,1988
• Topological framework for representing and solving probabilistic inference problems in expert systems
  IEEE Transactions on Systems, Man, and Cybernetics, 1988
• VLSI implementation of a neural network memory with several hundreds of neurons
  AIP Conference Proceedings, 1986
• Parallel Distributed Processing
  Published by MIT Press ,1986
• Optimization by Simulated Annealing
  Science, 1983