Micropumps: summarizing the first two decades

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Abstract
Among the large number of microfluidic components realized up to now, micropumps clearly represent the case of a 'long runner' in science. A brief literature review reveals, that one of the first scientific papers on a micropump dates from 1978, which is more than two decades ago. An increasing number of publications is found from that time on representing widespread research activities, and there seems to be no change of this trend. An astonishing diversity of micropump concepts and devices has emerged until today, reaching from peristaltic micropumps to a large number of micro diaphragm pumps to recent high-pressure devices without any moving parts. Electrohydrodynamic, electroosmotic, electrostatic, electromagnetic, magnetohydrodynamic, SMA, piezoelectric, thermopneumatic, hydraulic or pneumatic - almost every MEMS-based or mesoscopic actuation principle has been combined with micropumps. An outstanding diversity is also found in the fabrication technology - the span reaches from silicon-based devices over precision machining to injection moulding. This altogether makes it worth to summarize and also take a look into the future of micropumps - after the first two decades.

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