Reactivity between Ti and N2C2H2 mixed gas on Ti(C, N) film deposition by arc-like plasma-enhanced ion plating
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 228 (1) , 280-284
- https://doi.org/10.1016/0040-6090(93)90616-w
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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