A new structure for measuring the thermal conductivity of integrated circuit dielectrics
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Thermal conductivity measurements of thin-film silicon dioxidePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Boundary scattering of phonons in solid solutionsPhysics Letters A, 1968