A study of proximity effects at high electron-beam voltages for x-ray mask fabrication. I. Additive mask processes
- 1 November 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 8 (6) , 1763-1770
- https://doi.org/10.1116/1.585155
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: