MEMS Spectrometer for Infrared Gas Analysis based on a Tunable Filter of Porous Silicon
- 1 January 2001
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Free-standing, mobile 3D porous silicon microstructuresSensors and Actuators A: Physical, 2000
- Thermally actuated optical microscanner with large angle and low consumptionSensors and Actuators A: Physical, 1999
- Using apodization functions to reduce sidelobes in rugate filtersApplied Optics, 1989