Optical Emission Diagnostic of a Low Pressure Planar Microwave Discharge for Plasmachemical Deposition
- 1 January 1991
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 31 (6) , 669-679
- https://doi.org/10.1002/ctpp.2150310610
Abstract
No abstract availableKeywords
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