Fibre-optic scanning differential interference contrast optical microscope
- 16 January 1986
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 22 (2) , 103-105
- https://doi.org/10.1049/el:19860072
Abstract
A fibre-based scanning differential phase contrast optical microscope is described. The system does not need an optical bench, and requires a simple detection scheme. It displays a depth resolution of 1 Å in a 10 kHz bandwidth. Results of surface studies of a silicon wafer and polished stainless steel are presented.Keywords
This publication has 0 references indexed in Scilit: