OBIC measurements on planar high-voltage p+ -n junctions with diamond-like carbon films as passivation layer
- 1 March 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 65-66, 784-788
- https://doi.org/10.1016/0169-4332(93)90756-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- High-voltage planar junctions investigated by the OBIC methodIEEE Transactions on Electron Devices, 1987
- rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applicationsJournal of Applied Physics, 1983
- Passivation of p-n junction in crystalline silicon by amorphous siliconIEEE Transactions on Electron Devices, 1979
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971