Scanning ion imaging as a diagnostic tool for an ion microscope
- 1 April 1985
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 7 (2) , 74-78
- https://doi.org/10.1002/sia.740070204
Abstract
A scanning system has been installed on a Cameca IMS 3f ion microscope. The system has been invaluable for alignment of secondary ion extraction to the centre of the crater during depth profiling, detection of inclusions and lateral inhomogeneities during depth profiling and compensation of charging of insulators using an electron flood gun. Limitations of the standard gun have become apparent.Keywords
This publication has 1 reference indexed in Scilit:
- Practical Limitations in Depth Profiling of Low Energy Implants into Amorphised and Crystalline SiliconPublished by Springer Nature ,1984