Waveguide-coupled AlGaAs/GaAs microcavity ring and disk resonators with high finesse and 216-nm free spectral range

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-$\mathit{\mu }\mathrm{m}$-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-$\mathit{\mu }\mathrm{m}$-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-$\mathit{\mu }\mathrm{m}$-diameter ring and disk resonators to show the feasibility of such devices.