An X-ray Scattering Study of Laterally Modulated Structures: Investigation of Coherence and Resolution Effects with a Grating

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Abstract
An X-ray scattering experiment at small angle of incidence from the laterally modulated structure of a grating is reported. The attention is mainly focused on the determination of the linewidth of the different diffracted orders observed in transverse scans parallel to the surface of the grating. It is shown that the width of the different orders decreases when the incident angle increases and that the evolution of the width is consistent with the evolution of the instrumental resolution. It is also shown that if the spatial coherence of the beams is defined by the angular apertures of the incident and outgoing beams a identical behavior is expected at least when the diffracted orders are well separated

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