Methods And Needs For Low K Material Research

Publisher Website

1 January 1995

journal article
Published by Springer Nature in MRS Proceedings

Vol. 381
https://doi.org/10.1557/proc-381-3

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

A Silicon and Aluminum Dynamic Memory Technology
IBM Journal of Research and Development, 1980
Planar multilevel interconnection technology employing a polyimide
IEEE Journal of Solid-State Circuits, 1978