Interaction of Cu and CoSi2
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Self-aligned silicides or metals for very large scale integrated circuit applicationsJournal of Vacuum Science & Technology B, 1986
- Silicon/metal silicide heterostructures grown by molecular beam epitaxyApplied Physics Letters, 1980
- Handbook of Thin Film TechnologyJournal of the Electrochemical Society, 1971