Oxidation and ablation of polymers by vacuum-UV radiation from low pressure plasmas
- 1 August 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 131 (1-4) , 205-210
- https://doi.org/10.1016/s0168-583x(97)00154-7
Abstract
No abstract availableKeywords
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