Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope
- 1 March 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 18 (2) , 661-664
- https://doi.org/10.1116/1.591257
Abstract
We have developed microprocesses to make carbon-nanotube probes for a scanning probe microscope. The processes contain electric-field induced transportation, welding and fixation by electron-beam carbon deposition and are performed in a scanning electron microscope equipped with two individual manipulable stages. Using the nanotube probes produced, a fine structure of helical and twinned deoxyribonucleic acid and an abrupt height transition with high fidelity in a 4.7 GB digital versatile disk are imaged with tapping-mode atomic force microscopy in air.Keywords
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