Interfacial bonding in W/C and W/B4C multilayers
- 1 July 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (4) , 2914-2918
- https://doi.org/10.1116/1.576169
Abstract
The nature of carbon bonding in W/C and W/B4C multilayer structures is investigated by Auger electron spectroscopy (AES). The interfacial roughness in these x-ray mirrors directly affects their use as efficient optical elements. A significant contribution to interfacial roughness is the possible presence of second phases, WC in particular for the W/C and W/B4C combinations. AES depth profiling of the multilayer interfaces is used as a direct method to probe for the existence of WC.Keywords
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