Nodular growth in thick-sputtered metallic coatings

• 1 November 1974
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 11  (6) , 1186-1192
• https://doi.org/10.1116/1.1318706

Abstract

Keywords

• NODULAR GROWTH WITHIN A COATING
• THICK
• SPUTTERED
• STRESSED
• STRUCTURE
• NODULES