Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

• 1 May 1998
• journal article
• Published by Wiley in Advanced Materials
• Vol. 10  (8) , 571-574
• https://doi.org/10.1002/(sici)1521-4095(199805)10:8<571::aid-adma571>3.0.co;2-p

Abstract

Keywords

• FABRICATION
• GEL
• SOFT
• PHOTOLITHOGRAPHY
• AQUEOUS
• MICROGRAPH
• TITANOSILICATE
• PASSED