Preparation of copper and copper oxide films by metal-organic chemical vapour deposition using β-ketoiminato complexes
- 1 February 1993
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 17 (1-3) , 97-100
- https://doi.org/10.1016/0921-5107(93)90087-4
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Chemistry of copper(I) .beta.-diketonate complexes. 2. Synthesis, characterization, and physical properties of (.beta.-diketonato)copper(I) trimethylphosphine and bis(trimethylphosphine) complexesInorganic Chemistry, 1992
- The chemistry of β-diketonate copper(I) compounds—III. The synthesis of (β-diketonate) Cu(1,5-COD) compounds, the solid state structure and disproportionation of hexafluoroacetylacetonato (1,5-cyclooctadiene)copper(I), (hfac)Cu(1,5-COD)Polyhedron, 1991
- Atmospheric Pressure Chemical Vapor Deposition of Copper Thin Films: I . Horizontal Hot Wall ReactorJournal of the Electrochemical Society, 1991
- Kinetics of sublimation of copper(II) acetylacetonate complex used for chemical vapor deposition of copper filmsChemistry of Materials, 1991
- Chemical vapor deposition of copper from copper(I) trimethylphosphine compoundsChemistry of Materials, 1990
- Chemical Vapor Deposition of Copper from Copper (II) HexafluoroacetylacetonateJournal of the Electrochemical Society, 1989
- Thermal and plasma enhanced CVD OF HTc-superconductorsPhysica C: Superconductivity and its Applications, 1988
- Vapor pressure-temperature data for various metal β-diketone chelatesAnalytica Chimica Acta, 1965
- Vapor Deposition of Metals by Hydrogen Reduction of Metal ChelatesJournal of the Electrochemical Society, 1965
- The Acylation of Methyl Ketones with Aliphatic Esters by Means of Sodium Amide. Synthesis of β-Diketones of the Type RCOCH2COR1Journal of the American Chemical Society, 1944