Preferential orientation and magnetic properties of reactive sputtered Fe3O4 films.
Open Access
- 1 January 1985
- journal article
- Published by The Magnetics Society of Japan in Journal of the Magnetics Society of Japan
- Vol. 9 (2) , 215-218
- https://doi.org/10.3379/jmsjmag.9.215
Abstract
Magnetite (Fe3O4) thin films were prepared by RF reactive sputtering in an argon-oxygen mixed atmosphere. RF power density and total gas pressure, which affect the kinetic energy of sputtered atoms, were held constant. [111] preferential orientation of Fe3O4 films was improved by an increase of gas flow rate and a decrease of intermittent deposition rate. Squareness ratio (Mr/Ms) increased and coercive force (Hc) decreased with an improvement in the preferential orientation for these films.Keywords
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