High voltage modulator for pulsed ion implantation
- 1 December 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 62 (2) , 293-296
- https://doi.org/10.1016/0168-583x(91)95914-y
Abstract
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This publication has 1 reference indexed in Scilit:
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987