Electron induced chemical nanolithography with self-assembled monolayers
- 1 November 2001
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 19 (6) , 2732-2735
- https://doi.org/10.1116/1.1421560
Abstract
No abstract availableKeywords
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