Rapid Thermal Annealing of Ion-Implanted Silicon and Gallium Arsenide
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Crystalline to amorphous transformation in ion-implanted silicon: a composite modelJournal of Applied Physics, 1978
- Stability of dislocation loops near a free surfaceJournal of Applied Physics, 1972