Biased Electron Cyclotron Resonance Chemical-Vapor Deposition of Silicon Dioxide Inter-Metal Dielectric Thin Films
- 1 October 1993
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 140-142, 255-268
- https://doi.org/10.4028/www.scientific.net/msf.140-142.255
Abstract
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