Gaseous Diffusion of Arsenic and Phosphorus into Germanium

• 1 January 1961
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 108  (6) , 552
• https://doi.org/10.1149/1.2428134

Abstract

Keywords

• ARSENIC AND PHOSPHORUS
• PHOSPHORUS INTO GERMANIUM
• GASEOUS DIFFUSION OF ARSENIC