Novel fabrication method for Si1 − xTixO2 thin films with graded composition profiles by liquid phase deposition
- 23 February 2001
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 11 (4) , 984-986
- https://doi.org/10.1039/b100615k
Abstract
A novel technique for the direct synthesis of Si1 − xTixO2 thin films with graded composition profiles has been studied in aqueous solution, in which the (NH4)2SiF6 solutions were added into the (NH4)2TiF6 master solution under time- and rate-controlled reaction conditions: the composition of the films in the direction of the film thickness was successfully controlled over a wide range by this technique.Keywords
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