A New SIMS Instrument: The Cameca IMS 4F

• 1 January 1986
• book chapter
• Published by Springer Nature
• p. 155-157
• https://doi.org/10.1007/978-3-642-82724-2_37

Abstract

Keywords

• PRIMARY BEAM
• COLLECTION EFFI
• GALLIUM ARSENIDE
• PUMP EFFICIENCY
• DEFLECTION PLATE