Abstract
Metal oxides are important materials in industry. For example, there are many kinds of functional oxides: dielectric oxides such as BaTiO3 (perovskite), semiconductor oxides such as ZnO, ionic conductors such as Bi2O3, magnetic oxides such as Fe3−xMxO4 (spinel), and so on. These oxide materials must be prepared as films, nanodots, and layered films to increase their functionality for a wide variety of applications.