A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities
- 1 January 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (1) , 172-174
- https://doi.org/10.1063/1.1142951
Abstract
An ultrahigh vacuum (UHV) surface analysis chamber coupled with a high pressure cell (HPC) is described. The UHV chamber has been designed using an octagonal format to utilize several surface analytical techniques. In addition, the single‐level surface analysis chamber design allows simple access to the HPC for carrying out kinetic studies at elevated pressures (≳1 atmosphere) with in situ transfer from the UHV chamber. The UHV‐compatible HPC has been designed to facilitate the exchange of the sample or repair of the sample holder while maintaining the analysis chamber at UHV conditions.Keywords
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