High resolution imaging with high energy ion beams
- 1 May 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 77 (1-4) , 153-168
- https://doi.org/10.1016/0168-583x(93)95539-h
Abstract
No abstract availableKeywords
This publication has 41 references indexed in Scilit:
- Microcircuit imaging using an ion-beam-induced chargeJournal of Applied Physics, 1992
- Achromatic focussing for probeforming of high resolution microbeamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Charge collection ion microscopy: Imaging of defects in semiconductors with a positive ion microbeamNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Scanning transmission microscopy with a 2 MeV alpha particle microbeamNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Energy-loss radiography with a scanning MeV-ion microprobeNuclear Instruments and Methods in Physics Research, 1983
- Elemental microanalysis of biological and medical specimens with a scanning proton microprobeNuclear Instruments and Methods, 1980
- High resolution scanning ion probes: Applications to physics and biologyNuclear Instruments and Methods, 1980
- Total quantitative recording of elemental maps and spectra with a scanning microprobeJournal of Microscopy, 1979
- The Melbourne proton microprobeJournal of Microscopy, 1979
- A secondary electron imaging system for a nuclear microprobeNuclear Instruments and Methods, 1979