Deep-diode arrays

Abstract
Deep‐diode arrays consist of geometric arrays of long narrow columnar pn junctions extending through a thick semiconductor wafer. These arrays are produced by the thermomigration of large arrays of appropriately doped metal‐rich droplets through semiconductors. The processing techniques to make deep‐diode arrays are described and the various electrical properties of these arrays are discussed. Applications of deep‐diode arrays in the areas of semiconductor‐device manufacturing, planar integrated‐circuit technology and x‐ray and infrared detection are discussed.

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