Deep-diode arrays
- 1 June 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (6) , 2550-2557
- https://doi.org/10.1063/1.322973
Abstract
Deep‐diode arrays consist of geometric arrays of long narrow columnar p‐n junctions extending through a thick semiconductor wafer. These arrays are produced by the thermomigration of large arrays of appropriately doped metal‐rich droplets through semiconductors. The processing techniques to make deep‐diode arrays are described and the various electrical properties of these arrays are discussed. Applications of deep‐diode arrays in the areas of semiconductor‐device manufacturing, planar integrated‐circuit technology and x‐ray and infrared detection are discussed.This publication has 51 references indexed in Scilit:
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