Mass Spectrometer Leak Detector with Improved Sensitivity
- 1 December 1959
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 30 (12) , 1093-1095
- https://doi.org/10.1063/1.1716451
Abstract
A new type of mass spectrometer leak detector is described which has a sensitivity for helium of 10−13 standard cc/sec with a signal-to-noise ratio of unity. Operating pressure is in the 10−5 to 10−6 mm Hg range, time for ⅔ of final response is 2 sec or less, and operating characteristics are similar to present helium-sensitive mass spectrometer leak detectors.Keywords
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