Use of vibration-isolated cryopumps to improve electron microscopes and electron beam lithography units

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Abstract
Improved vacuum systems and the elimination of hydrocarbon contaminants are essential elements of todays e-beam instruments. Electron microscope manufacturers have made great progress in the reduction of contamination and etching, but the need for continued improvement and additional research still remains. Current advances in vacuum technology and the advent of the vibration-free closed cycle cryopump are contributing to this scientific progression.

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