Lattice site location of clustered boron atoms in silicon
- 1 January 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 45 (1-4) , 438-441
- https://doi.org/10.1016/0168-583x(90)90870-z
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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