Damage profiling of Ar+ -irradiated Si(100) and GaAs(100) by medium energy ion scattering
- 1 January 1989
- journal article
- Published by Elsevier in Surface Science
- Vol. 207 (2-3) , 427-440
- https://doi.org/10.1016/0039-6028(89)90133-7
Abstract
No abstract availableKeywords
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