Effect of Temperature and Oxygen Pressure on Preparation of Bi2Sr2CaCu2Ox Thin Films by Metalorganic Deposition

Abstract
Bi2Sr2CaCu2O x superconducting thin films have been prepared by metalorganic deposition (MOD) under various oxygen pressures. The pressure-temperature (P-T) phase diagram of Bi2Sr2CaCu2O x was determined under oxygen pressures from 0.02 to 0.2 atm. A film which was fired at 785°C in 0.06 atm oxygen with the thickness of about 0.1 µm showed a critical current density (J c) of 2×104 A/cm2 at 30 K. The relationship between J c and firing conditions is discussed.