Test specimens for SEM voltage contrast

Publisher Website

1 December 1985

journal article
Published by Elsevier in Microelectronic Engineering

Vol. 3 (1-4) , 203-210
https://doi.org/10.1016/0167-9317(85)90029-2

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

Extraction field and oxide charging in voltage contrast systems
Scanning, 1985
Digital techniques for improved voltage measurements
Scanning, 1985