An accurate sputtered spot pattern monitor
- 1 April 1967
- journal article
- Published by IOP Publishing in Journal of Scientific Instruments
- Vol. 44 (4) , 261-264
- https://doi.org/10.1088/0950-7671/44/4/304
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Atomic collision sequences in crystals of copper, silver and gold revealed by sputtering in energetic ion beamsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1961
- Electron bombardment apparatus for vacuum evaporationJournal of Scientific Instruments, 1959
- Sputtering of Metal Single Crystals by Ion BombardmentJournal of Applied Physics, 1955
- Sur les déterminations des constantes optiques des métaux massifs faites au moyen des lames épaissesJournal de Physique et le Radium, 1953